IMNS Silicon-AFM-Probes

IMNS Silicon-AFM-Probes provide the well-known features of the convenient AFM probes such
as high application versatility and compatibility with most commercial AFMs with a small
reproducible tip radius as well as a more defined tip shape. The typical tip radius of less than 10
nm and the minimized variation in tip shape provide more reproducible images and enhanced
resolution.

IMNS Silicon-AFM-Probes

IMNS Silicon-AFM-Probes provide the well-known features of the convenient AFM probes such as high application versatility and compatibility with most commercial AFMs with a small reproducible tip radius as well as a more defined tip shape. The typical tip radius of less than 10 nm and the minimized variation in tip shape provide more reproducible images and enhanced resolution.

LOTUSSENSOR

General Info

IMNS Silicon-AFM-probes are manufactured from highly doped, single crystal silicon without any intrinsic mechanical stress. Its low resistivity of 0.002-0.004 ohm/cm avoids electrostatic charging of the probe. The monolithic fabricated probes lead to an absolutely straight cantilever without any bending. Gold backside coating provides the high reflective chemistry stable layer that improves reflectivity 2.5 times in comparison with uncoated probes. The chemical inertness allows application in fluids or electrochemical cells. The tip is pointing into the <100> crystal direction.

Substrate

• Material: single, crystal silicon
• Chip size: 1.6 x 3.4 x 0.3 mm

Tip

• Total tip shape is tetrahedral
• Tip radius is typically 5-10 nm
• Tip height is 10 – 15 µm
• Tip offset: 5 – 20 µm

Cantilever

• Backside width is given in probes specification
• Available for contact, non-contact, Semicontact mode
• Tip is set on the controlled distance 5-20 um from the free cantilever end

Special Versions based on the IMNS Silicon-AFM-probes

• Standard AFM probes are available for SPM and AFM high resolution imaging. These probes
  are selected for contact, non-contact and semicontact mode.
• Tipless cantilever for selected Contact, Non-Contact and Force Modulation Mode scanning
  probes.
• Magnetic Probes are available for high resolution and minimal invasive Magnetic Force
  Microscopy.

Coatings

• Au Coating on detector side 70 nm thick layer of gold which enhances the reflectivity of the laser
  beam by a factor of about 2.5.
• Au Coating on both sides 70 nm thick layer of gold on both sides of the cantilever.
• Magnetic Coating for the visualization of magnetic domains selected Magnetic Probes with
  different hard and soft magnetic coatings are offered (refer to Magnetic Force Microscopy flyer).

surface topography of  test samples by LOTUS’s AFM tips

Semicontact/noncontact probes

N series

Contact probes

C series

Electrical probes

E series

Magnetic probes

M series